High frequency venting of MEMS ultrasonic transducers and sensors: materials solutions

Abstract

This paper introduces the concept of ultrasonic venting. Similar to acoustic vents, ultrasonic vents refer to the aperture in air-coupled MEMS ultrasonic transducers (either PMUT or CMUT) intended to allow the equalization of internal and external pressures, the transfer of heat and the pass of ultrasonic waves, while impeding the penetration of fluids or particles that can affect the transducer membrane. To that end, vents are covered with a porous membrane whose properties are tuned to meet the afore mentioned requirements. The main difficulty in ultrasonic venting, compared with acoustic venting, is that the required “transparency” to ultrasonic waves is much more difficult to achieve. This involves two main problems as both transmission loss and frequency distortion are much larger at ultrasonic frequencies than in the audio range. The objectives of this paper are: to measure the response of acoustic venting materials in the ultrasonic frequency range, to determine the usability of these materials in ultrasonic vents, and to extract useful information for the design of efficient ultrasonic venting materials. Transmission coefficient spectra of different acoustic venting materials is measured in the frequency range 0.2 – 2.7 MHz. The origin of the ultrasonic losses and frequency distortion are analysed as well as the role of mode conversion, internal interferences, modes interference, etc. Results reveal that none of the acoustic venting materials analysed can be used in ultrasonic venting applications, but the obtained knowledge about the response of these materials in the ultrasonic frequency range permit to advance in the selection of successful candidate materials for this application.